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SiC MMIC Foundry Services

Located in Durham, North Carolina, Cree’s foundry offers high-performance silicon carbide (SiC) MMICs based on our unique second-generation SiC MESFET device process.

Initial foundry and engineering support services include both custom design solutions using Cree’s internal MMIC design team and fabrication of external customer designs using standard device models and layout design rules. The advanced MMIC process allows the incorporation of integral resistors, capacitors, and through-substrate vias on a single RF integrated circuit.

With 4x the power density, 10x the thermal conductivity, and significantly higher operating voltages than GaAs or silicon, SiC offers significant performance advantages for systems requiring high power or wide bandwidth performance.

Applications for our SiC MMICs include high power amplifiers, driver amplifiers, and gain blocks for commercial wireless infrastructure, wideband military communications, and high power radar applications.

Preliminary foundry and engineering support services include:

• Fabrication of external customer designs using standard device models and layout design rules
• Custom design services using Cree’s internal team of MMIC designers
• Automated design rule checking
• Layout verification
• 3-inch SiC wafer fabrication with statistical process control monitoring
• On-wafer DC and RF test services

Cree’s SiC MMIC process offers a new technology choice for next-generation platforms or improvements to existing systems operating from baseband through 6 GHz.

Features of our SiC MESFET MMIC process include:

• 50 volt drain operation
• 0.45 µm gate length
• Substrate vias
• NiCr resistors
• High Voltage MIM capacitors
• 100 µm die thickness
• Solderable backside gold metalization

Typical RF MESFET performance at 3.5 GHz:

• 4 W/mm power density
• 12 dB small signal gain
• 60% PAE

Summary of Basic Foundry Services:

• Design rule documentation
• Unit cell model parameters
• Model and design rule consultation
• DRC and layout verification
• Mask procurement
• MMIC wafer processing with full backside
• On-wafer test services
• Custom design to spec

Typical Applications:

• Cellular Infrastructure
• High Power Radar
• Mil Aero
• Wideband Military Communications
• Broad Band Military Jamming
• Electronic Warfare
• Secure COMM for Homeland Defense

Typical MMIC Development Schedule:

Inquiries regarding the SiC MMIC foundry service should be directed to the following e-mail address: creefoundry@cree.com.